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Optical Surface Profiler Wyko NT9300

Main equipment


The Wyko NT9300 optical surface profiler offer a quick, easy, and reliable way to make non-contact 3-D measurements of many different surface and samples with sub-nanometer resolution. Wyko NT9300 optical profiling system consists of key components that work together to provide detailed information regarding sample. The system includes:

* Modular Optics (IOMA) mounted on a motorized Z-axis and automated tip/tilt cradle
* A motorized X-Y sample stage with range 200-200 mm
* Various magnification objectives mounted on a motorized turret or single objective adapter mount (3x, 20x, 50x)
* Various FOV magnification objectives (0.55x, 0.75x, 1x, 1.5x, 2x)
* An operation station
* An integrated vibration-isolation table

The Wyko NT9300 system supports two standard measurements modes – PSI (phase-shifting interferometry) and VSI (vertical scanning interferometry).

PSI, which uses a narrowband light source, is typically used to test smooth surface (roughness less than 30 nm), such as mirrors, optics, or other highly polished samples. This method becomes ineffective as height discontinuities of adjacent pixel approach one quarter of the used wavelength (lambda/4, or about 135 nm when using a 535-nm filter)

VSI, which uses a broadband light source, is effective for measuring objects with rough surface, and those with adjacent pixel-height differences greater than lambda/4. However, is yields precision in the nanometer range, rather than in the subnanometer range, as does PSI.

Contact Name:  Dr. Maciej Marian Spychalski

© Materials Design Division

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